Inline gas filters, Wafergard® III NF Micro

Leverancier: ENTEGRIS INC

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ENTEWG3NS5RR2EA 0 EUR
ENTEWG3NS5RR2 ENTEWG3NSMFR2 ENTEWG3NSMFF2 ENTEWG3NSMJJ2 ENTEWG3NSMRF2 ENTEWG3NSMSL2
Inline gas filters, Wafergard® III NF Micro
Filters Gasfilters
The patented nickel filter membrane of these inline gas filters offers superior corrosion resistance and excellent compatibility with inert and reactive gases. Not recommended for use with CO, O₃ and low-level hydride dopant gases.

  • Superior particulate filtration for ultrapure gas system filtration
  • Housing assembly eliminates outgassing by minimising weld area

Filter element: patented, sintered nickel membrane; housing: electropolished F20 stainless steel

Applications: ultrapure gas lines, high temperature and dynamic pressure applications, new fab construction, inert and reactive gases.

Downstream cleanliness particles: Less than 0,03 particles/liter (\<1 particle/0,028 m³) greater than 0,01 μm

Downstream cleanliness volatiles : Volatile outgassing of H₂O, O₂ and THC is below detectable limits (by RGA and FID at room temperature)
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