Inline gas filters, Wafergard® III NF Mini and Mini XL

Leverancier: ENTEGRIS INC

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ENTEWG3NS2RR2EA 0 EUR
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Inline gas filters, Wafergard® III NF Mini and Mini XL
Filters Gasfilters
The patented nickel filter membrane of these inline gas filters offers superior corrosion resistance and excellent compatibility with inert and reactive gases. Not recommended for use with CO, O₃ and low-level hydride dopant gases.

  • Superior particulate filtration for ultrapure gas system filtration
  • Housing assembly eliminates outgassing by minimising weld area
  • Eliminates outgassing, improves corrosion resistance and provides excellent chemical compatibility

Filter element: patented, sintered nickel membrane; housing: electropolished VAR 316L stainless steel.

Applications: ultrapure gas lines, high temperature and dynamic pressure applications, new fab construction, inert and reactive gases.

Downstream cleanliness: <0,03 particles/liter (<1 particle/0,028 m³) >0,01 μm.
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