Inline gas filters, Wafergard® II F Micro

Leverancier: Entegris
Wafergard®
ENTEWGFG01RH2EA 0 EUR
ENTEWGFG01RH2 ENTEWG2FT1RR2 ENTEWG2FT1SS2 ENTEWG2FT1BW2 ENTEWG2FT1RF2
Inline gas filters, Wafergard® II F Micro
Filters Gasfilters
Recommended for inert and reactive gases, these filters offer excellent compatibility with all classes of semiconductor process gases. Its compact diameter enables easy installation in cramped gas panels and cabinets.

  • Superior particulate filtration for ultrapure gas system filtration
  • Low pressure drop reduces the risk of condensation in low vapour pressure gases
  • Cleanroom manufactured, welded and tested
  • PTFE membranes provide high efficiency filtration

Filter element: hydrophobic PTFE membrane supported by moulded PTFE PFA structure; housing: electropolished VAR 316L stainless steel.

Downstream cleanliness particles: Less than 0,03 particles/liter (<1 particle/0,028 m³) greater than 0,01 μm.

Downstream cleanliness volatiles: <10 ppb moisture.
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