Gas filters, FG series, Wafergard® SG

Leverancier: Entegris
Wafergard®
ENTEWGFGMBRR4EA 0 EUR
ENTEWGFGMBRR4 ENTEWGFGMBSS4 ENTEWGFG50PR1 ENTEWGFG02PS1 ENTEWGFGMBSS3 ENTEWGFG02PR1 ENTEWGFGMBSS2 ENTEWGFGMBRR2 ENTEWGFGT1PR1 ENTEWGFGT1PS1 ENTEWGFG32PS1
Gas filters, FG series, Wafergard® SG
Filters Gasfilters
Wafergard® SG FG series gas filters provide superior particulate filtration to maximise photovoltaic cell and display manufacturing production yields.

  • Complatible with high-purity gases including N₂, CDA, H₂, SiH₄ and NF₃
  • Superior downstream cleanliness with retention rate of 9 LRV at rated flow

Filter element: Hydrophobic PTFE membrane supported by molded PTFE, PFA structure and PFA O-ring; Housing: electropolished 316 L stainless steel

Maximum forward differential pressure: 4,14 bar at 23 °C

Maximum reverse differential pressure: 0,69 bar at 23 °C
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